Interpretation of ion distribution functions measured by a combined energy and mass analyzer
Author:
Publisher
Elsevier BV
Subject
Physical and Theoretical Chemistry,Spectroscopy,Condensed Matter Physics,Instrumentation
Reference42 articles.
1. Ion energy distributions in SF6plasmas at a radio‐frequency powered electrode
2. Mass‐resolved ion energy measurements at both electrodes of a 13.56 MHz plasma in CF4
3. Deposition mechanisms for promoting sp3 bonding in diamond-like carbon
4. Recent results in cubic boron nitride deposition in light of the sputter model
5. Superharte dünne Schichten: Große Fortschritte bei der Herstellung von superharten Materialien mit ionengestützten Verfahren
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