Stress control of porous silicon films for microelectromechanical systems-Reference-Cited by-同舟云学术

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Stress control of porous silicon films for microelectromechanical systems

Published:2015-12 Issue: Volume:218 Page:88-94
ISSN:1387-1811
Container-title:Microporous and Mesoporous Materials
language:en
Short-container-title:Microporous and Mesoporous Materials

Author:

Sun Xiao,Keating Adrian,Parish Giacinta

Funder

The University of Western Australia

the UWA Scholarships for International Research Fees

Publisher

Elsevier BV

Subject

Mechanics of Materials,Condensed Matter Physics,General Materials Science,General Chemistry

Reference27 articles.

1. An integrated CMOS sensing chip for NO2 detection

2. CMOS-compatible fabrication of porous silicon gas sensors and their readout electronics on the same chip

3. Porous Silicon and its Application for Micromachining Technologies;Lai,2011

4. Released micromachined beams utilizing laterally uniform porosity porous silicon

5. Porous silicon strain during in situ ultrahigh vacuum thermal annealing

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1. Crystalline and Porous Silicon;Synthesis Lectures on Materials and Optics;2024

2. Thermal analysis of surface micromachined porous silicon membranes using the 3ω method: Implications for thermal sensing;Applied Thermal Engineering;2023-03

3. Optimized Growth of Strained Sige Films on Annealed Compliant Double Porous Silicon Substrates;2023

4. Surface micromachining multilayer porous silicon for spectral filtering applications;Materials Science in Semiconductor Processing;2022-02

5. Micromachined porous silicon Fabry-Pérot long wavelength infrared filters;Sensors and Actuators A: Physical;2021-12

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