Thermal analysis of surface micromachined porous silicon membranes using the 3ω method: Implications for thermal sensing-Reference-Cited by-同舟云学术

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Thermal analysis of surface micromachined porous silicon membranes using the 3ω method: Implications for thermal sensing

Published:2023-03 Issue: Volume:222 Page:119965
ISSN:1359-4311
Container-title:Applied Thermal Engineering
language:en
Short-container-title:Applied Thermal Engineering

Author:

Erfantalab Sobhan,Sharma Pritam,Parish Giacinta,Keating Adrian

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Energy Engineering and Power Technology,Fluid Flow and Transfer Processes,Mechanical Engineering

Reference61 articles.

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4. Uncooled thermal imaging: arrays, systems, and applications;Kruse,2001

5. Performance model for uncooled infrared bolometer arrays and performance predictions of bolometers operating at atmospheric pressure;Niklaus;Infrared Phys. Technol.,2008

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