Deposition of TiSiN coatings by arc ion plating process
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference39 articles.
1. Ion-plated titanium carbonitride films
2. Material selection for hard coatings
3. Superhard nanocrystalline composite materials: The TiN/Si3N4 system
4. Mechanical properties and oxidation resistance of nanocomposite TiN–SiNx physical-vapor-deposited thin films
5. Improving the properties of titanium nitride by incorporation of silicon
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