Deposition of TiSiN coatings by arc ion plating process
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference39 articles.
1. Ion-plated titanium carbonitride films
2. Material selection for hard coatings
3. Superhard nanocrystalline composite materials: The TiN/Si3N4 system
4. Mechanical properties and oxidation resistance of nanocomposite TiN–SiNx physical-vapor-deposited thin films
5. Improving the properties of titanium nitride by incorporation of silicon
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1. Atomic scale formation mechanism of the Amorphous-Nanocrystalline biphase structure in TiSiN Coating: Phase field crystal simulation and experimental characterization;Applied Surface Science;2024-05
2. Effect of the TiSiN interlayer properties on the adhesion and mechanical properties of multilayered TiSiCN thin films;Surface and Coatings Technology;2024-02
3. Influence of Ag Target Power on Microstructure and Properties of TiN-Si3N4-Ag Composite Coatings;Journal of Materials Engineering and Performance;2023-07-24
4. Microstructure, mechanical properties and optical reflectance of TiNiN films deposited on silicon substrates using cathodic arc evaporation;Thin Solid Films;2023-07
5. Effect of bias voltages on microstructure and mechanical properties of (AlCrNbSiTi)N high entropy alloy nitride coatings deposited by arc ion plating;Surface Engineering;2023-04-03
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