Mechanical properties and oxidation resistance of nanocomposite TiN–SiNx physical-vapor-deposited thin films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference34 articles.
1. Structure and properties of TiN coatings
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4. Oxidation of metastable single‐phase polycrystalline Ti0.5Al0.5N films: Kinetics and mechanisms
5. Anti-oxidation properties of TiAlN film prepared by plasma-assisted chemical vapor deposition and roles of Al
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