Synthesis and characterization of tantalum nitride films prepared by cathodic vacuum arc technique-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Synthesis and characterization of tantalum nitride films prepared by cathodic vacuum arc technique

Published:2007-04 Issue:12 Volume:253 Page:5223-5227
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Niu Erwu,Li Li,Lv Guohua,Feng Wenran,Chen Huan,Fan Songhua,Yang Size,Yang Xuanzong

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference25 articles.

1. Deposition and Characterization of Ta, TaNxand Ta4B Films for Next-Generation Lithography Mask Applications

2. Characterization of nanocrystalline tantalum nitride formed by solid–gas reaction during mechanical alloying

3. Manufacture and properties of ceramic cutting tools: a review

4. Magnetic properties and structure of a new multilayer [FeTaN/TaN]nfor recording heads

5. Phase formation behavior and diffusion barrier property of reactively sputtered tantalum-based thin films used in semiconductor metallization

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Stable Oxygen Incorporation in Superconducting TaN: An Experimental and Theoretical Assessment;ACS Omega;2024-08-01

2. Amorphous NTTO optical composite films were deposited by N2-Ar flow ratio gradient RF magnetron sputtering;Optical Materials;2024-08

3. Tribological study of TaTiN/TaTi multilayer films with hierarchical arrangement;Wear;2022-06

4. Study on microstructure and tribological properties of AlSn films deposited via magnetron sputtering ion plating;Applied Surface Science;2019-07

5. Structural properties and corrosion resistance of tantalum nitride coatings produced by reactive DC magnetron sputtering;RSC Advances;2016

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3