Inhibitors for organic phosphonic acid system abrasive free polishing of Cu-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Inhibitors for organic phosphonic acid system abrasive free polishing of Cu

Published:2009-01 Issue:7 Volume:255 Page:4114-4118
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Wei Zhang,Xinchun Lu,Yuhong Liu,Guoshun Pan,Jianbin Luo

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference19 articles.

1. Chemical Mechanical Polishing of Dielectric Films Using Mixed Abrasive Slurries

2. Copper chemical mechanical polishing using a slurry-free technique

3. Study of Pattern Density Effects in CMP Using Fixed Abrasive Pads

4. Self-conditioning of encapsulated abrasive pad in chemical mechanical polishing

Cited by 28 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Electrochemical Polishing Method for Titanium Alloys with a Microgroove Structure;Processes;2024-05-28

2. Surface Corrosion Inhibition Effect and Action Mechanism Analysis of 5-Methyl-Benzotriazole on Cobalt-Based Copper Film Chemical Mechanical Polishing for GLSI;ECS Journal of Solid State Science and Technology;2023-04-01

3. Surface corrosion inhibition effect and action mechanism analysis of 5-methyl-benzotriazole on cobalt-based copper film chemical mechanical polishing for GLSI;2022-08-18

4. Prediction of planarization property in copper film chemical mechanical polishing via response surface methodology and convolutional neural network;Nano Select;2021-08-11

5. Synthesis and Tribological Performance of Carbon Microspheres/Poly(methyl methacrylate) Core–Shell Particles as Highly Efficient Lubricant;The Journal of Physical Chemistry C;2019-11-06

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3