Influence of oxygen plasma treatment on boron carbon nitride film composition-Reference-Cited by-同舟云学术

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Influence of oxygen plasma treatment on boron carbon nitride film composition

Published:2009-01 Issue:6 Volume:255 Page:3635-3638
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Aoki Hidemitsu,Masuzumi Takuro,Watanabe Daisuke,Mazumder M.K.,Sota Hiroshi,Kimura Chiharu,Sugino Takashi

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference17 articles.

1. Proceedings of International Interconnect Technology Conference (IITC);Fukusawa,2005

2. Nano-mechanical properties of BCN/CN/BN multilayer films

3. Boron carbon nitride film with low dielectric constant as passivation film for high speed electronic devices

4. Ag Diffusion in Low-kMaterials (BCN and SiOC) and Its Challenges for Future Interconnection

5. Proceedings of New Diamond and Nano Carbons (NDNC);Aoki,2007

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2. Effect of Heat and Plasma Treatment on Carboranethiol Self-Assembled Monolayers on Copper;The Journal of Physical Chemistry C;2023-06-05

3. Boron carbide thin film surface characterization after graphitic carbon removal using low-pressure oxygen gas RF plasma;Applied Optics;2023-02-08

4. A review of boron carbon nitride thin films and progress in nanomaterials;Materials Today Advances;2020-12

5. Deposition temperature dependence on the bonding structure and mechanical properties of laser ablated boron-carbonitride thin films;International Journal of Materials Research;2019-12-10

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