Deposition temperature dependence on the bonding structure and mechanical properties of laser ablated boron-carbonitride thin films

Abstract

AbstractBoron-carbonitride thin films were synthesized on Si (100) substrates by laser ablation, and the effect of deposition temperatures on the bonding structure and mechanical properties were studied to enhance the mechanical properties. The results of Fourier-transform infrared spectroscopy and X-ray photoelectron spectroscopy demonstrated that B–N, B–C, N–C and N=C bonds coexisted in the thin films with the ternary B–C–N hybridization structure. The deposition rate decreased as deposition temperatures increased, and the hardness and modulus fluctuated between 14.5 and 27.2 GPa and 146 and 246 GPa, respectively. The law of evaluation of the mechanical properties with deposition temperatures was found to be related to the changes in the bonding structure, and the maximum hardness and modulus were 27.2 GPa and 246 GP, respectively, when deposition temperature reached 400°C.