Structural evolution and defect control of yttrium-doped ZrO 2 films grown by a sol–gel method-Reference-Cited by-同舟云学术

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Structural evolution and defect control of yttrium-doped ZrO 2 films grown by a sol–gel method

Published:2014-11 Issue: Volume:320 Page:128-137
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Jeong Kwang Sik,Song Jinho,Lim Donghyeok,Lee Myung Soo,Kim Hyoungsub,Cho Mann-Ho

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference29 articles.

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5. Electrical characterization of ZrO2/Si interface properties in MOSFETs with ZrO2 gate dielectrics;Liu;IEEE Electron Device Lett.,2007

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