Influence of ion/atom arrival ratio on structure and optical properties of AlN films by ion beam assisted deposition-Reference-Cited by-同舟云学术

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Influence of ion/atom arrival ratio on structure and optical properties of AlN films by ion beam assisted deposition

Published:2014-10 Issue: Volume:317 Page:760-764
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Meng Jian-ping,Fu Zhi-qiang,Liu Xiao-peng,Yue Wen,Wang Cheng-biao

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference24 articles.

1. Epitaxial and polycrystalline growth of AlN by high temperature CVD: experimental results and simulation;Boichot;Surf. Coat. Technol.,2010

2. In situ investigation for polarity-controlled epitaxy processes of GaN and AlN in MBE and MOVPE growth;Yoshikawa;Opt. Mater.,2003

3. Structural characterization of AlN films synthesized by pulsed laser deposition;Szekeres;Appl. Surf. Sci.,2011

4. Influence of deposition conditions on optical properties of aluminum nitride (AlN) thin films prepared by DC-reactive magnetron sputtering;Mahmood;Mater. Lett.,2003

5. Effect of argon ion beam voltages on the microstructure of aluminum nitride films prepared at room temperature by a dual ion beam sputtering system;Chen;Appl. Surf. Sci.,2004

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1. Microstructural characterization of nanocrystalline hexagonal boron nitride thin films deposited by ion-beam assisted pulsed laser deposition;Surface and Coatings Technology;2024-07

2. Micro-Mechanical Finite Element Analysis on Mechanical Behavior of EN31 Steel-Based Metal Matrix Composite;Transactions of the Indian Institute of Metals;2022-09-16

3. Computational and experimental investigation on mechanical behavior of zirconia toughened alumina and nickel powder reinforced EN31 based composite material;Materialwissenschaft und Werkstofftechnik;2021-05

4. Microstructure and mechanical properties of Cu-ZTA cermet prepared by vacuum hot pressing sintering;Materials Research Express;2020-02-01

5. Biaxial Texture Evolution in MgO Films Fabricated Using Ion Beam-Assisted Deposition;Journal of Electronic Materials;2016-04-13

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