Growth of high quality AlN films on CVD diamond by RF reactive magnetron sputtering-Reference-Cited by-同舟云学术

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Growth of high quality AlN films on CVD diamond by RF reactive magnetron sputtering

Published:2018-02 Issue: Volume:431 Page:152-159
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Chen Liang-xian,Liu Hao,Liu Sheng,Li Cheng-ming,Wang Yi-chao,An Kang,Hua Chen-yi,Liu Jin-long,Wei Jun-jun,Hei Li-fu,Lv Fan-xiu

Funder

Fundamental Research Funds for the Central Universities

National Natural Science Foundation of China (NSFC)

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference19 articles.

1. SAW propagation characteristics and fabrication of piezoelectric thin film/diamond structure;Yamanouchi,1989

2. Application of aluminum nitride films for electronic devices;Belyanin;Diam. Relat. Mater.,1999

3. Near milliwatt power AlGaN-based ultraviolet light emitting diodes based on lateral epitaxial overgrowth of AlN on Si(111);Zhang;Appl. Phys. Lett.,2013

4. Growth morphology and surface acoustic wave measurements of AIN films on sapphire;Liu;J. Appl. Phys.,1975

5. The dispersion properties of surface acoustic wave devices on AlN/LiNbO3 film/substrate structure;Kao;Appl. Surf. Sci.,2004

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1. An adjustable Ar ion-beam activation strategy to achieve hydrophilic bonding of Si and diamond by deposited AlN interlayer;Applied Surface Science;2024-03

2. The evolution of preferred orientation and morphology of AlN films under various sputtering parameters;Journal of Crystal Growth;2024-01

3. The solution of wetting issues in GaN epitaxy on (111) SCD with magnetron sputtered AlN;Journal of Alloys and Compounds;2024-01

4. Fabrication and characterization of hybrid bulk and surface acoustic wave resonators with Ag/patterned-AlN/Mo/diamond/Si layered structure;Diamond and Related Materials;2023-04

5. Self-powered and improved photoresponsive broadband photodetecting sensors using Au/NiFe2O4/p-Si heterojunction architecture;Materials Science in Semiconductor Processing;2023-03

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