Silicon carbonitride by remote microwave plasma CVD from organosilicon precursor: Growth mechanism and structure of resulting Si:C:N films-Reference-Cited by-同舟云学术

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Silicon carbonitride by remote microwave plasma CVD from organosilicon precursor: Growth mechanism and structure of resulting Si:C:N films

Published:2007-06 Issue:17 Volume:253 Page:7211-7218
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Blaszczyk-Lezak I.,Wrobel A.M.,Kivitorma M.P.M.,Vayrynen I.J.,Tracz A.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference46 articles.

1. A covalent micro/nano-composite resistant to high-temperature oxidation

2. Silicon carbonitride: a rival to cubic boron nitride

3. Silicon carbonitride, a new hard material and its relation to the confusion about ‘harder than diamond’ C3N4

4. Stability of Silicon Carbonitride Phases

5. Structure and chemistry of silicon nitride and silicon carbonitride thin films deposited from ethylsilazane in ammonia or hydrogen

Cited by 28 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Plasma Enhanced High-Rate Deposition of Advanced Film Materials by Metal Reactive Evaporation in Organosilicon Vapors;Membranes;2023-03-24

2. Amorphous silicon carbonitride (a‐SiCN) thin film coatings by remote plasma chemical vapor deposition using organosilicon precursor: Effect of substrate temperature;Plasma Processes and Polymers;2022-12-27

3. Organosilicon compounds as single-source precursors for SiCN films production;Journal of Organometallic Chemistry;2022-01

4. Hard silicon carbonitride thin‐film coatings produced by remote hydrogen plasma chemical vapor deposition using aminosilane and silazane precursors. 1: Deposition mechanism, chemical structure, and surface morphology;Plasma Processes and Polymers;2021-02-15

5. Multilayer PECVD Si–C–N Films;Springer Proceedings in Physics;2020

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