Copper adatom, admolecule transport, and island nucleation on TiN(0 0 1) via ab initio molecular dynamics
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference67 articles.
1. Growth thermal stability and Cu diffusivity of reactively sputtered NbN thin films as diffusion barriers between Cu and Si;Huang;ECS J. Solid State Sci. Technol.,2013
2. Effect of microstructure on diffusion of copper in TiN films;Gupta;J. Appl. Phys.,2003
3. Grain boundary diffusion of copper in tantalum nitride thin films;Lin;J. Electrochem. Soc.,1999
4. Microstructural design of hard coatings;Mayrhofer;Prog. Mater Sci.,2006
5. Reactive magnetron cosputtering of hard and conductive ternary nitride thin films: Ti-Zr-N and Ti-Ta-N;Abadias;J. Vac. Sci. Technol., A,2010
Cited by 13 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. A combined DFT and AIMD study: The effect of nitrogen on Tobermorite9 Å;Materials Today Communications;2022-12
2. Deposition of Co islands on Cu(111) and Cu–Al(111): A comparative study from DFT calculations;Vacuum;2022-03
3. A combined molecular dynamics/Monte Carlo simulation of Cu thin film growth on TiN substrates: Illustration of growth mechanisms and comparison with experiments;Applied Surface Science;2021-12
4. Machine learning predictions of surface migration barriers in nucleation and non-equilibrium growth;Communications Materials;2021-09-02
5. Performance of Cu–Ag Thin Films as Diffusion Barrier Layer;Coatings;2020-11-13
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3