High-rate growth of gallium oxide films by plasma-enhanced thermal oxidation for solar-blind photodetectors

Author:

Su TongORCID,Xiao BohanORCID,Ai Zikang,Bao LingjieORCID,Chen WenchengORCID,Shen YuhengORCID,Cheng QijinORCID,(Ken) Ostrikov Kostya

Funder

Natural Science Foundation of Fujian Province

Centre for Materials Science, Queensland University of Technology

Australian Research Council

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference65 articles.

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3. Review of self-powered solar-blind photodetectors based on Ga2O3;Wu;Mater. Today Phys.,2022

4. Recent progress on the electronic structure, defect, and doping properties of Ga2O3;Zhang;APL Mater.,2020

5. The properties of gallium oxide thin film grown by pulsed laser deposition;Feng;Appl. Surf. Sci.,2015

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