登录 注册 会员服务 联系我们

Surface chemistry and optimization of focused ion beam iodine-enhanced etching of indium phosphide

  • Published:2007-09 Issue:22 Volume:253 Page:8969-8973
  • ISSN:0169-4332
  • Container-title:Applied Surface Science
  • language:en
  • Short-container-title:Applied Surface Science

Author:

Callegari Victor,Nellen Philipp M.,Yang Tianhe,Hauert Roland,Müller Ulrich,Hernández-Ramírez Francisco,Sennhauser Urs

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Enhancing the focused ion beam etch rate of Ag films by Joule heating;Journal of Vacuum Science & Technology B;2018-11

2. Review Article: Advanced nanoscale patterning and material synthesis with gas field helium and neon ion beams;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2017-05

3. Laser-Assisted Focused He+ Ion Beam Induced Etching with and without XeF2 Gas Assist;ACS Applied Materials & Interfaces;2016-10-17

4. AES and EELS tools associated to TRIM simulation methods to study nanostructures on III-V semiconductor surfaces;IOP Conference Series: Materials Science and Engineering;2012-02-07

5. Analysis of the propagation losses of InP/InGaAsP trench waveguides fabricated by focused ion beam;Microelectronic Engineering;2010-11
同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号  京ICP备18003416号-3