Enhancing the focused ion beam etch rate of Ag films by Joule heating

Author:

Sasaki Takahiro1,Tohmyoh Hironori1

Affiliation:

1. Department of Finemechanics, Tohoku University, Aoba 6-6-01, Aramaki, Aoba-ku, Sendai 980-8579, Japan

Funder

Japan Society for the Promotion of Science

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Grain growth of Cu wires during Joule heat welding;Journal of Vacuum Science & Technology B;2023-01-01

2. Tensile Strength of Thin Pt Wires Welded by Joule Heat;Journal of Materials Engineering and Performance;2022-09-23

3. Rapid growth of ultra-long Al whiskers from TiN/Al/Si island structures;Journal of Crystal Growth;2021-11

4. Corrosion behavior of Ag film lines in atmospheric conditions estimated by means of electrical resistance technique;Journal of Vacuum Science & Technology B;2020-01

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