Author:
Wang Bao-Min,Ru Guo-Ping,Jiang Yu-Long,Qu Xin-Ping,Li Bing-Zong,Liu Ran
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference25 articles.
1. International Technology Roadmap for Semiconductors: 2007 Edition, http://www.itrs.net/Links/2007ITRS/Home2007.htm.
2. Advanced high-κ dielectric stacks with polySi and metal gates: Recent progress and current challenges
3. Symp. VLSI Technol.;Jung,2007
4. IEEE IEDM;Takahashi,2004
5. Characteristics of Ni/Gd FUSI for NMOS Gate Electrode Applications
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