Author:
Simpson Robin,White Richard G.,Watts John F.,Baker Mark A.
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference33 articles.
1. Influence of postdeposition annealing on the enhanced structural and electrical properties of amorphous and crystalline Ta2O5 thin films for dynamic random access memory applications;Joshi;J. Appl. Phys.,1999
2. Preparation and properties of tantalum pentoxide (Ta2O5) thin films for ultra large scale integrated circuits (ULSIs) application—a review;Ezhilvalavan;J. Mater. Sci.: Mater. Electron.,1999
3. Thickness-dependence of optical constants for Ta2O5 ultrathin films;Zhang;Appl. Phys. A,2012
4. U. Wätjen, M.P. Seah, S.J. Spencer, C. Ingelbrecht, The certification of a fourth batch of tantalum pentoxide on tantalum foil’ Report EUR 22610 EN, Office for Official Publications of the European Communities, Luxembourg, (2006).
5. Ion sputter rates of Cr–Mn–Fe spinel oxides;Wild;Surf. Interface Anal.,1989
Cited by
210 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献