Controlled growth of periodically aligned copper‐silicide nanocrystal arrays on silicon directed by laser-induced periodic surface structures (LIPSS)-Reference-Cited by-同舟云学术

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Controlled growth of periodically aligned copper‐silicide nanocrystal arrays on silicon directed by laser-induced periodic surface structures (LIPSS)

Published:2017-10 Issue: Volume:420 Page:70-76
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Nürnberger Philipp,Reinhardt Hendrik M.,Rhinow Daniel,Riedel René,Werner Simon,Hampp Norbert A.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference44 articles.

1. Silicides: science, technology and applications;Kumar,2002

2. Metal silicides: an integral part of microelectronics;Chen;JOM—J. Miner. Met. Mater. Soc.,2005

3. Metal silicides in CMOS technology: past, present, and future trends;Zhang;Crit. Rev. Solid State Mater. Sci.,2003

4. Diffusion barrier in thin films;Nicolet;Thin Solid Films,1978

5. Competition of electromigration reliability in copper and nickel-silicide;Cheng;J. Electrochem. Soc.,2011

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