1. The International Technology Roadmap for Semiconductors, 2004 Update, Samiconductor Industry Association (San Jose, CA: Semiconductor Industry Association, 2004), http://public.itrs.net.
2. L.J. Chen, editor, Silicide Technology for Integrated Circuits (London: IEE, 2004).
3. Z. Ma and L.H. Allen, “Titanium Silicide Technology,” in Ref. 2. pp. 49–76.
4. T. Kikkawa, K. Inoue, and K. Imai, “Cobalt Silicide Technology,” in Ref. 2,. pp. 77–94.
5. C. Lavoie, C. Detavernier, and P. Besser, “Nickel Silicide Technology,” in Ref. 2, pp. 95–152.