Publisher
Institution of Engineering and Technology
Cited by
2 articles.
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1. Formation of single-orientation epitaxial islands of TiSi2 on Si(001) using Sr passivation;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2011-05
2. Metal silicides: An integral part of microelectronics;JOM;2005-09