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Electric and pyroelectric properties of AlN thin films deposited by reactive magnetron sputtering on Si substrate

  • Published:2015-10 Issue: Volume:353 Page:1195-1202
  • ISSN:0169-4332
  • Container-title:Applied Surface Science
  • language:en
  • Short-container-title:Applied Surface Science

Author:

Stan G.E.,Botea M.,Boni G.A.,Pintilie I.,Pintilie L.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Cited by 32 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Ultrafast near-infrared pyroelectric detector based on inhomogeneous plasmonic metasurface;Light: Science & Applications;2024-09-06

2. Molecular dynamics simulations on ferroelectricity of AlN thin films;Journal of the American Ceramic Society;2024-08-18

3. Influence of growth parameters and systematical analysis on 8-inch piezoelectric AlN thin films by magnetron sputtering;Materials Science in Semiconductor Processing;2024-01

4. Characterizing the Electrical Properties of (002)-Orientated Aluminum-Nitride Films Synthesized Directly on Single Crystal (100) Si by Reactive Sputtering;2023 IEEE 22nd International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS);2023-12-11

5. Piezoelectric MEMS for Frequency Control and Sensing;2023 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS);2023-05-15
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