Author:
Seo Dongwan,Na Jihoon,Lee Seunghyo,Lim Sangwoo
Funder
Industrial Strategic Technology Development Program
Development of Total Front-End Cleaning Technologies for Ge and III–V Semiconductor Channel
Ministry of Trade, Industry & Energy (Korea)
Priority Research Centers Program
Ministry of Education
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Cited by
22 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献