Identification of nanoscale structure and morphology reconstruction in oxidized a-SiC:H thin films-Reference-Cited by-同舟云学术

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Identification of nanoscale structure and morphology reconstruction in oxidized a-SiC:H thin films

Published:2012-11 Issue: Volume:260 Page:73-76
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Vasin A.V.,Rusavsky A.V.,Nazarov A.N.,Lysenko V.S.,Lytvyn P.M.,Strelchuk V.V.,Kholostov K.I.,Bondarenko V.P.,Starik S.P.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference12 articles.

1. MEMS rotary engine power system;Fernandez-Pello;IEEJ Trans. SM,2003

2. Enhanced stability of Ti/Pt micro-heaters using a-SiC:H passivation layers

3. Characterization of a-SiCx:H thin films as an encapsulation material for integrated silicon based neural interface devices

4. PECVD amorphous silicon carbide membranes for cell culturing

5. Evaluation of MEMS materials of construction for implantable medical devices

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Highly porous carbon films fabricated by magnetron plasma enhanced chemical vapor deposition: Structure, properties and implementation;Applied Surface Science;2019-12

2. Carbon-Rich Nanostructurated a-SiC on Si Heterostructures for Field-Effect Electron Emission;Advanced Materials Research;2013-11

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