Highly porous carbon films fabricated by magnetron plasma enhanced chemical vapor deposition: Structure, properties and implementation-Reference-Cited by-同舟云学术

Highly porous carbon films fabricated by magnetron plasma enhanced chemical vapor deposition: Structure, properties and implementation

Published:2019-12 Issue: Volume:496 Page:143735
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Slobodian O.M.^ORCID,Rusavsky A.V.,Vasin A.V.,Khyzhun O.Yu.,Gudymenko O.I.,Kladko V.P.,Nikolenko A.S.,Tsykaniuk B.I.,Lytvyn P.M.,Gomeniuk Yu.V.,Fesenko O.M.,Nazarov A.N.

Funder

Science & Technology Center in Ukraine

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

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