Carbon-Rich Nanostructurated a-SiC on Si Heterostructures for Field-Effect Electron Emission-Reference-Cited by-同舟云学术

Carbon-Rich Nanostructurated a-SiC on Si Heterostructures for Field-Effect Electron Emission

Published:2013-11 Issue: Volume:854 Page:59-67
ISSN:1662-8985
Container-title:Advanced Materials Research
language:
Short-container-title:AMR

Author:

Nazarov A.N.¹,Gordienko S.O.¹,Lytvyn P.M.¹,Stadnik A.A.¹,Gomeniuk Y.Y.²,Vasin A.V.¹,Rusavsky A.V.¹,Nazarova T.M.³,Lysenko V.S.¹

Affiliation:

1. National Academy of Sciences of Ukraine

2. V. Lashkaryov Institute of Semiconductor Physics

3. National Technical University of Ukraine “KPI”

Abstract

The paper describes emission properties of a new nanostructured material carbon-rich amorphous silicon carbide (a-SiC) deposited on silicon wafer. Proposed material technology demonstrates that the field enhancement factor of the electron emission of this material can reach 1000 with the current density of about 1x10-3A/cm2 and efficiency of electron emission ~10%. A good correlation between the charge transfer through the a-SiC layer and electron emission from the material in high vacuum is observed.

Publisher

Trans Tech Publications, Ltd.

Subject

General Engineering

Link

https://www.scientific.net/AMR.854.59.pdf

Reference18 articles.

1. T. Maki, H. Kawamura, S. Kato, J.P. Liu, and T. Kobayashi, Electronic properties of diamond thin film for planar diamond electron emitter applications, Appl. Surf. Sci. 159–160 (2000) 583–587.

2. N.A. Fox, M.J. Youh, W.N. Wang, J.W. Steeds, H-F. Cheng, and I-N. Lin, Properties of electron field emitters prepared by selected area deposition of CVD diamond carbon films, Diamond and Related Materials 9 (2000) 1263–1269.

3. A. G. Chakhovskoi, C. E. Hunt, G. Forsberg, T. Nilsson, and P. Persson, Reticulated vitreous carbon field emission cathodes for light source applications, J. Vac. Sci. Technol. B 21 (2003) 571-575.

4. P. Gröning, P. Ruffieux, and L. Schlapbach, Carbon nanotubes for cold electron sources, Advanced Engineering Materials 5 (2003) 541- 550.

5. Y. Tzeng, Y. Chen, and C. Liu, Fabrication and characterization of non-planar high-current-density carbon-nanotube coated cold cathodes, Diamond and Related Materials 12 (2003) 442–445.