Characterization of physical and mechanical properties of Al2O3-doped ZnO (AZO) thin films deposited on transparent polyimide supports with various ALD process parameters-Reference-Cited by-同舟云学术

Characterization of physical and mechanical properties of Al2O3-doped ZnO (AZO) thin films deposited on transparent polyimide supports with various ALD process parameters

Published:2021-01 Issue: Volume:535 Page:147731
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Lee Gyeong-Beom,Song Seung Hak,Lee Myeong-Woo,Kim Yun-Jae,Choi Byoung-Ho

Funder

National Research Foundation of Korea

Ministry of Science, ICT and Future Planning

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference47 articles.

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