Effect of deposition regime transition on the properties of Al:ZnO transparent conducting oxide layer by radio frequency magnetron sputtering system
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Published:2024-08
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ISSN:0272-8842
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Container-title:Ceramics International
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language:en
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Short-container-title:Ceramics International
Author:
Abd Rahman Mohd NazriORCID,
Zuhdi Ahmad Wafi MahmoodORCID,
Amirulddin Ungku Anisa UngkuORCID,
Isah MustaphaORCID,
Azman Nurul Izzati,
Arsad Akmal ZainiORCID,
Arzaee Nurul Affiqah,
Mansor Marwan,
Shuhaimi Ahmad