Author:
Palleschi S.,Mastrippolito D.,Benassi P.,Nardone M.,Ottaviano L.
Funder
Ministero dell’Istruzione, dell’Università e della Ricerca
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference60 articles.
1. International roadmap for devices and systemTM, http://irds.ieee.org/.
2. Chapter 14 - electronics and communication, in: M. Nayfeh (Ed.), Fundamentals and Applications of Nano Silicon in Plasmonics and Fullerines, Micro and Nano Technologies, Elsevier, 2018, pp. 431–485. doi: 10.1016/B978-0-323-48057-4.00014-1.
3. Electrical characterization of semiconductor materials and devices;Deen;J. Mater. Sci.: Mater. Electron.,2006
4. A spreading resistance technique for resistivity measurements on silicon;Mazur;J. Electrochem. Soc.,1966
5. Between carrier distributions and dopant atomic distribution in beveled silicon substrates;Hu;J. Appl. Phys.,1982
Cited by
9 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献