Simulation of the transport of sputtered atoms and effects of processing conditions
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference26 articles.
1. Sputtering deposited TiNi films: relationship among processing, stress evolution and phase transformation behaviors
2. Sputtered-deposited thin brass films in a modified glow discharge Grimm-type source
3. Reactive magnetron sputtering deposition and columnar growth of nc‐TiC∕a‐C:H nanocomposite coatings
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