Reactive magnetron sputtering deposition and columnar growth of nc‐TiC∕a‐C:H nanocomposite coatings-Reference-Cited by-同舟云学术

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Reactive magnetron sputtering deposition and columnar growth of nc‐TiC∕a‐C:H nanocomposite coatings

Published:2006-07 Issue:4 Volume:24 Page:1441-1447
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Galvan D.,Pei Y. T.,De Hosson J. Th. M.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.2188411

Cited by 15 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Comparative study of titanium carbide films deposited by plasma-enhanced and conventional magnetron sputtering at various methane flow rates;Ceramics International;2023-08

2. Effect of carbon content on the structural, mechanical and corrosion properties of TiC films deposited using a HiPIMS discharge;Surface and Coatings Technology;2022-12

3. Magnetron sputtered titanium carbide-based coatings: A review of science and technology;Vacuum;2022-03

4. On the effect of the substrate to target position on the properties of titanium carbide/carbon coatings;Surface and Coatings Technology;2017-11

5. Superhard nanocomposite nc-TiC/a-C:H coatings: The effect of HiPIMS on coating microstructure and mechanical properties;Surface and Coatings Technology;2017-02

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