Deposition of O atomic layers on Si(100) substrates for epitaxial Si-O superlattices: investigation of the surface chemistry

Author:

Jayachandran Suseendran,Delabie Annelies,Billen Arne,Dekkers Harold,Douhard Bastien,Conard Thierry,Meersschaut Johan,Caymax Matty,Vandervorst Wilfried,Heyns Marc

Funder

European Commission

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference52 articles.

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5. Surface chemistry and interface formation during the atomic layer deposition of alumina from trimethylaluminum and water on indium phosphide;Adelmann;Chem. Mater.,2013

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