Author:
Jayachandran Suseendran,Delabie Annelies,Billen Arne,Dekkers Harold,Douhard Bastien,Conard Thierry,Meersschaut Johan,Caymax Matty,Vandervorst Wilfried,Heyns Marc
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference52 articles.
1. International Technology Roadmap for Semiconductors. http://www.itrs.net/ (accessed September 03, 2014).
2. Strained silicon MOSFET technology;Hop;Int. Electron Devices Meet.,2002
3. Layout impact on the performance of a locally strained PMOSFET;Eneman;Symp. VLSI Technol.,2005
4. Ultimate scaling of CMOS logic devices with Ge and III-V materials;Heyns;MRS Bull.,2009
5. Surface chemistry and interface formation during the atomic layer deposition of alumina from trimethylaluminum and water on indium phosphide;Adelmann;Chem. Mater.,2013
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