ALD of ZnO using diethylzinc as metal-precursor and oxygen as oxidizing agent
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference21 articles.
1. Electrical behavior of zinc oxide layers grown by low temperature atomic layer deposition
2. Extremely low temperature growth of ZnO by atomic layer deposition
3. Interface study of CuInSe2/ZnO and Cu(In,Ga)Se2/ZnO devices using ALD ZnO buffer layers
4. Atomic layer deposition of zinc oxide and indium sulfide layers for Cu(In,Ga)Se2 thin-film solar cells
5. A comprehensive review of ZnO materials and devices
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