Fabrication of the similar porous alumina silicon template for soft UV nanoimprint lithography-Reference-Cited by-同舟云学术

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Fabrication of the similar porous alumina silicon template for soft UV nanoimprint lithography

Published:2013-07 Issue: Volume:276 Page:363-368
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Sun Tangyou,Xu Zhimou,Zhao Wenning,Wu Xinghui,Liu Sisi,Zhang Zheng,Wang Shuangbao,Liu Wen,Liu Shiyuan,Peng Jing

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference34 articles.

1. Imprint Lithography with 25-Nanometer Resolution

2. Nanoimprint Lithography: Methods and Material Requirements

3. Nanoimprint lithography: an alternative nanofabrication approach

4. Anti-adhesion treatment for nanoimprint stamps using atmospheric pressure plasma CVD (APPCVD)

5. Vertically Aligned Nanopillar Arrays with Hard Skins Using Anodic Aluminum Oxide for Nano Imprint Lithography

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1. Laser-assisted electrohydrodynamic jet printing of hierarchical nanostructure;Applied Thermal Engineering;2024-09

2. High Anti-Reflection Large-Scale Cup-Shaped Nano-Pillar Arrays via Thin Film Anodic Aluminum Oxide Replication;Nanomaterials;2022-05-30

3. Wafer-scale high anti-reflective nano/micro hybrid interface structures via aluminum grain dependent self-organization;Materials & Design;2020-09

4. Morphology-dependent high antireflective surfaces via anodic aluminum oxide nanostructures;Applied Surface Science;2019-12

5. Recent Progress in Ultraviolet Nanoimprint Lithography and Its Applications;Journal of Nanoelectronics and Optoelectronics;2019-03-01

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