Anti-adhesion treatment for nanoimprint stamps using atmospheric pressure plasma CVD (APPCVD)-Reference-Cited by-同舟云学术

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Anti-adhesion treatment for nanoimprint stamps using atmospheric pressure plasma CVD (APPCVD)

Published:2012-11 Issue: Volume:261 Page:441-446
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Wu Chien-Li,Yang Cho-Yun,An Tai-Pang,Lin Je-Wei,Sung Cheng-Kuo

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference21 articles.

1. Atomic-scale friction in direct imprinting process molecular dynamics simulation;Hsieh;Japanese Journal of Applied Physics,2007

2. Contact angles in a thermal imprint process;Bogdanski;Journal of Vacuum Science and Technology B,2008

3. Assessment of release properties in UV nanoimprint lithography using high-aspect-ratio nanoscale molds;Takahashi;Journal of Vacuum Science and Technology B,2010

4. Anti-sticking treatment for a nanoimprint stamp;Sun;Applied Surface Science,2008

5. Mold surface treatment for imprint lithography;Hirai;Journal of Photopolymer Science and Technology,2001

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1. Nondestructive Demolding of Structure-Designable High-Aspect-Ratio Nanoimprint Template;Langmuir;2024-09-12

2. Controllable fabrication of polymeric nanowires by NIL technique and self-assembled AAO template for SERS application;Scientific Reports;2021-07-22

3. A titanium-nickel composite mold with low surface energy for thermal nanoimprint lithography;Materials Letters;2020-02

4. Preparation and tribological properties of self-assembled tetraethoxysilane/octadecyltrichlorosilane bilayer films;Surface Topography: Metrology and Properties;2019-05-03

5. Atmospheric pressure plasma enhanced chemical vapor deposition of SiOx films for improved corrosion resistant properties of AZ31 magnesium alloys;Surface and Coatings Technology;2015-12

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