Mold Surface Treatment for Imprint Lithography.-Reference-Cited by-同舟云学术

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Mold Surface Treatment for Imprint Lithography.

Published:2001 Issue:3 Volume:14 Page:457-462
ISSN:0914-9244
Container-title:Journal of Photopolymer Science and Technology
language:en
Short-container-title:J. Photopol. Sci. Technol.

Author:

Hirai Yoshihiko,Yoshida Satoshi,Okamoto Akio,Tanaka Yoshio,Endo Masataka,Irie Sigeo,Nakagawa Hideo,Sasago Masaru

Publisher

Technical Association of Photopolymers, Japan

Subject

Materials Chemistry,Organic Chemistry,Polymers and Plastics

Link

http://www.jstage.jst.go.jp/article/photopolymer1988/14/3/14_3_457/_pdf

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4. Metal Atom Desorption from Organofluorine Surfaces: What Factors Govern Desorption?;Advanced Materials Interfaces;2022-08-10

5. Durable Soft Mold for Imprinting of High-Adhesive Resin;Coatings;2021-01-27

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