Author:
Mikšová R.,Macková A.,Jagerová A.,Malinský P.,Slepička P.,Švorčík V.
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference65 articles.
1. Ion implantation of polymers: formation of nanoparticulate materials;Popok;Rev. Adv. Mater. Sci.,2012
2. Stress and plastic flow in silicon during amorphization by ion bombardment;Volkert;J. Appl. Phys.,1991
3. Electronic excitation induced mass transport on 200 MeV 107Ag14+ ion irradiated Si surface;Singh;J. Appl. Phys.,2000
4. Handbook of Semiconductor Manufacturing Technology;Nishi,2000
5. Ion-beam-induced amorphization and recrystallization in silicon;Pelaz;Appl. Phys. Rev.,2004
Cited by
5 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献