Overcoming the insulating materials limitation in HiPIMS: Ion-assisted deposition of DLC coatings using bipolar HiPIMS
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference26 articles.
1. Ionized physical vapor deposition (IPVD): a review of technology and applications;Helmersson;Thin Solid Films,2006
2. High power pulsed magnetron sputtering: a review on scientific and engineering state of the art;Sarakinos;Surf. Coat. Technol.,2010
3. High power impulse magnetron sputtering discharge;Gudmundsson;J. Vac. Sci. Technol. A,2012
4. A novel pulsed magnetron sputter technique utilizing very high target power densities;Kouznetsov;Surf. Coat. Technol.,1999
5. Copper thin films deposited under different power delivery modes and magnetron configurations: a comparative study;Velicu;Surf. Coat. Technol.,2017
Cited by 41 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Early-stage silver growth during sputter deposition on SiO2 and polystyrene – Comparison of biased DC magnetron sputtering, high-power impulse magnetron sputtering (HiPIMS) and bipolar HiPIMS;Applied Surface Science;2024-09
2. Enhancing sp3 formation in DLC on low thermal conductivity substrate: Interval deposition minimizing ion energy sensitivity;Diamond and Related Materials;2024-08
3. HiPIMS and bipolar HiPIMS techniques for tunable phase formation of yttrium oxide thin films at low-temperature;Vacuum;2024-08
4. Effect of magnetic field configuration on double layer formation and reverse discharge ignition in bipolar HiPIMS;Plasma Sources Science and Technology;2024-06-01
5. On double-layer and reverse discharge creation during long positive voltage pulses in a bipolar HiPIMS discharge;Plasma Sources Science and Technology;2024-05-01
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3