Copper thin films deposited under different power delivery modes and magnetron configurations: A comparative study-Reference-Cited by-同舟云学术

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Copper thin films deposited under different power delivery modes and magnetron configurations: A comparative study

Published:2017-10 Issue: Volume:327 Page:192-199
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Velicu Ioana-Laura,Tiron Vasile,Rusu Bogdan-George,Popa Gheorghe

Funder

“Alexandru Ioan Cuza” University

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference31 articles.

1. Nanostructured Materials and Their Applications;Logothetidis,2011

2. Mechanical Tribology: Materials, Characterization, and Applications;Totten,2004

3. Electrical properties of giant-grain copper thin films formed by a low kinetic energy particle process;Nitta;J. Electrochem. Soc.,1992

4. Structural and optical characterization of Cu3N films prepared by reactive RF magnetron sputtering;Kim;J. Cryst. Growth,2001

5. Elastic/plastic effects during very low-load hardness testing of copper;Armstrong;Acta Metall. Mater.,1995

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