Fabrication of series-pattern micro-disk electrode and its application in machining micro-slit of less than 10 μm
Author:
Publisher
Elsevier BV
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering
Reference16 articles.
1. Improvement of thickness uniformity in nickel electroforming for the LIGA process;Yang;International Journal of Machine Tools and Manufacture,2000
2. High-aspect-ratio photolithography for MEMS applications;Miyajima;Journal of Microelectromechanical Systems,1995
3. The LIGA technique and its potential for microsystems: a survey;Bacher;IEEE Transactions on Industrial Electronics,1995
4. X-ray lathe: an X-ray lithographic exposure tool for nonplanar objects;Feinerman;Journal of Microelectromechanical Systems,1996
5. Modeling micro-end-milling operations. Part I: analytical cutting force model;Bao;International Journal of Machine Tools and Manufacture,2000
Cited by 47 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. A new method for preparing ultra-large aspect ratio microcylindrical electrode array by EDM;Archives of Civil and Mechanical Engineering;2024-07-24
2. Ultrasonic vibration-assisted electrical discharge machining of enclosed microgrooves with laminated electrodes;Journal of Materials Research and Technology;2024-05
3. A review on the use of microslit for various applications and its fabrication;Journal of the Brazilian Society of Mechanical Sciences and Engineering;2024-01-28
4. Research on Geometric Constraint Strategies for Controlling the Diameter of Micro-Shafts Manufactured via Wire Electric Discharge Grinding;Micromachines;2023-11-29
5. Fabrication of Micro-grooves by Applying Laminated Disc Electrodes;Fabrication of Micro/Nano Structures via Precision Machining;2023
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3