1. Capacitive micromachined ultrasonic transducers: next-generation arrays for acoustic imaging?;Oralkan;IEEE Trans. Ultrason. Ferroelectr. Freq. Control,2002
2. Fabricating capacitive micromachined ultrasonic transducers with a novel silicon-nitride-based wafer bonding process;Logan;IEEE Trans. Ultrason. Ferroelectr. Freq. Control,2009
3. Electrostatic forces and their effects on capacitive mechanical sensors;Puers;Sens. Actuators A Phys.,1996
4. Y. Huang, E.O. Haeggstrom, X. Zhuang, A.S. Ergun, B.T. Khuri-Yakub, Optimized membrane configuration improves CMUT performance, in: Proc. IEEE Ultrason. Symp., 2004, pp. 505–508.
5. S. Zhou, P. Reynolds, J.A. Hossack, Improving the performance of capacitive micromachined ultrasound transducers using modified membrane and support structures, in: Proc. IEEE Ultrason. Symp, 2005, pp. 1925–1928.