Capacitive micromachined ultrasonic transducers: Transmission evaluation with different membrane materials and dimensions
Author:
Tripathi Sudhanshu12ORCID, Agarwal Rekha3, Vashisth Rashmi3, Singh Devraj4
Affiliation:
1. Department of Instrumentation and Control Engineering , Amity School of Engineering and Technology , Noida , Uttar Pradesh - , India 2. University School of Information Communication and Technology , 28791 Guru Gobind Singh Indraprastha University , Dwarka , Delhi - , India 3. Department of Electronics and Communication Engineering , Amity School of Engineering and Technology , Noida , Uttar Pradesh - , India 4. Department of Physics, Prof. Rajendra Singh (Rajju Bhaiya) Institute of Physical Sciences for Study and Research , V.B.S. Purvanchal University , Jaunpur , Uttar Pradesh - , India
Abstract
Abstract
Capacitive micromachined ultrasonic transducers (CMUTs) are dominant in generating and receiving acoustic signals. CMUT transmission efficiency solely depends upon the membrane material utilized. This work presents the structural examination of receiving and transmitting characteristics of CMUT with divergent membrane materials, namely Silicon (Si), Silicon Nitride (
Si
3
N
4
{\mathrm{Si}_{3}}{\text{N}_{4}}
), Indium Phosphide (InP), Zinc Oxide (ZnO), and Polysilicon (Poly-Si). The analysis includes the membrane deflection, pull-in voltage, output pressure, resonant frequency and capacitance modification with variable DC voltage. It has been found that InP gives the pull-in voltage comparable to Si in the receiving mode and have more transduction efficiency in transmitting mode. Effect of dimensions of CMUT on pull-in voltage and resonant frequency are also discussed. The major contribution lies in the analytical and estimation study of CMUT for appropriate membrane material selection meant for transmission and reception in the field of pressure sensing application.
Publisher
Walter de Gruyter GmbH
Subject
Electrical and Electronic Engineering,Instrumentation
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