Automatic equipment fault fingerprint extraction for the fault diagnostic on the batch process data
Author:
Funder
ANR
Publisher
Elsevier BV
Subject
Software
Reference95 articles.
1. Recipe-independent indicator for tool health diagnosis and predictive maintenance;Chen;IEEE Trans. Semicond. Manuf.,2009
2. Offline and online fault detection and diagnosis of induction motors using a hybrid soft computing model;Seera;Appl. Soft Comput.,2013
3. Simultaneous-fault detection based on qualitative symptom descriptions for automotive engine diagnosis;Vong;Appl. Soft Comput.,2014
4. Data mining for yield enhancement in semiconductor manufacturing and an empirical study;Chien;Expert Syst. Appl.,2007
5. Comparison of four direct classification methods for intelligent fault diagnosis of rotating machinery;Dou;Appl. Soft Comput.,2016
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