Synthesis and characterization of hafnium oxide and hafnium aluminate ultra-thin films by a sol–gel spin coating process for microelectronic applications-Reference-Cited by-同舟云学术

Synthesis and characterization of hafnium oxide and hafnium aluminate ultra-thin films by a sol–gel spin coating process for microelectronic applications

Published:2007-04 Issue:5-7 Volume:353 Page:663-669
ISSN:0022-3093
Container-title:Journal of Non-Crystalline Solids
language:en
Short-container-title:Journal of Non-Crystalline Solids

Author:

Phani A.R.,Passacantando M.,Santucci S.

Publisher

Elsevier BV

Subject

Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference19 articles.

1. Conductance transient, capacitance–voltage and deep-level transient spectroscopy characterization of atomic layer deposited hafnium and zirconium oxide thin films

2. Breakdown of ultrathin anodic valve metal oxide films in metal-insulator-metal-contacts compared with metal-insulator-electrolyte contacts

3. Characterization and process effects of HfO2 thin films grown by metal-organic molecular beam epitaxy

4. Hafnium and zirconium silicates for advanced gate dielectrics

5. High-κ gate dielectrics: Current status and materials properties considerations

Cited by 26 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Hydrothermal Synthesis and Photocatalytic Activity of NiTiO₃ for the Degradation of Malachite Green under Visible Light Irradiation;ChemistrySelect;2024-01-29

2. Buteinylated-hafnium oxide bionanoparticles for electrochemical sensing of wogonin;Nanoscale;2023

3. Synthesis, characterization of undoped and copper-doped hafnium oxide nanoparticles by sol–gel method;Journal of Materials Science: Materials in Electronics;2022-03-22

4. An innovative method for preparation of sol–gel HfO2 films with high laser-induced damage threshold after high-temperature annealing;Applied Surface Science;2021-07

5. Opto-electronic properties of HfO2: A first principle-based spin-polarized calculations;Optik;2021-01