Surface oxidation of Si assisted by irradiation with large gas cluster ion beam in an oxygen atmosphere
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference10 articles.
1. Low-Temperature Growth (400<tex>$^circhboxC$</tex>) of High-Integrity Thin Silicon–Oxynitride Films by Microwave-Excited High-Density Kr–O<tex>$_2$</tex>–<tex>$hboxNH_3$</tex>Plasma
2. Optimization of nitrided gate dielectrics by plasma-assisted and rapid thermal processing
3. Non-linear processes in the gas cluster ion beam modification of solid surfaces
4. Gas cluster ion beam processing of gallium antimonide wafers for surface and sub-surface damage reduction
5. Gas cluster ion beam infusion processing of semiconductors
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. In situ X-ray photoelectron spectroscopy study of gas cluster ion beam etching of FeCo film;Japanese Journal of Applied Physics;2014-01-01
2. Gas Cluster Ion Beam Etching under Acetic Acid Vapor for Etch-Resistant Material;Japanese Journal of Applied Physics;2013-05-01
3. Development of Cu Etching Using O$_{2}$ Cluster Ion Beam under Acetic Acid Gas Atmosphere;Japanese Journal of Applied Physics;2012-08-20
4. Development of Cu Etching Using O2Cluster Ion Beam under Acetic Acid Gas Atmosphere;Japanese Journal of Applied Physics;2012-08-01
5. Atomic spectrometry update. Atomic mass spectrometry;Journal of Analytical Atomic Spectrometry;2008
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3