Auger electron emission from a Si(111) surface during 11-keV Ar+ ion sputtering
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference9 articles.
1. Anomalously high yield of doubly charged Si ions sputtered from cleaned Si surface by keV neutral Ar impact
2. Comparison of ion-excited Auger electron emission and secondary ion emission from silicon bombarded with noble gas ions
3. Effect of residual oxygen on ionization processes of Si+ and Si2+ sputtered from Si(111)-7×7 surface
4. Auger spectra induced by Ne+and Ar+impact on Mg, Al, and Si
5. Angle-resolved auger electron spectra induced by neon ion impact on aluminum
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1. Ion-induced Auger electrons contrast on cross-beam systems;Semiconductor Science and Technology;2019-11-20
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