Author:
Sakuma Y.,Kato M.,Shinde N.,Yagi S.,Soda K.
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Cited by
3 articles.
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1. Auger electron emission from a Si(111) surface during 11-keV Ar+ ion sputtering;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2013-11
2. Symmetric and asymmetric collision effects on the formation of singly and doubly-charged ions in sputtering process;The European Physical Journal D;2012-07
3. Dependence of Si+ and Si2+ sputtering yields on residual oxygen impurity;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2011-05