Surface damage of 6H–SiC originating from argon plasma irradiation-Reference-Cited by-同舟云学术

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Surface damage of 6H–SiC originating from argon plasma irradiation

Published:2013-11 Issue: Volume:315 Page:213-217
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Kawakami Retsuo,Niibe Masahito,Takeuchi Hideo,Konishi Masashi,Mori Yuta,Shirahama Tatsuo,Yamada Tetsuya,Tominaga Kikuo

Funder

Japan Society for the Promotion of Science.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference28 articles.

1. Accurate evaluation of interface state density in SiC metal-oxide-semiconductor structures using surface potential based on depletion capacitance

2. Influence on electrical characteristics of the design of 4H-SiC ultraviolet photodetectors: Theoretical analysis and simulations

3. Reliability of Nitrided Gate Oxides for N- and P-Type 4H-SiC(0001) Metal–Oxide–Semiconductor Devices

4. Playing with carbon and silicon at the nanoscale

5. Current SiC technology for power electronic devices beyond Si

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Single-crystalline SiC integrated onto Si-based substrates via plasma-activated direct bonding;Ceramics International;2020-10

2. A Nanoscale Plasma Etching Process for Pole Tip Recession of Perpendicular Recording Magnetic Head;Materials Science;2016-05-19

3. Experimental and thermodynamic comparison between a novel CO2/CH4 and an oxygen submerged DC thermal plasma for treatment of sebacic acid in basic aqueous solution;Journal of Environmental Chemical Engineering;2014-12

4. Comparison of CO2and oxygen DC submerged thermal plasmas for decomposition of carboxylic acid in aqueous solution;Journal of Physics: Conference Series;2014-11-26

5. Application of a Novel CO2 DC Thermal Plasma Torch Submerged in Aqueous Solution for Treatment of Dissolved Carboxylic Acid;Plasma Chemistry and Plasma Processing;2014-08-01

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