Ion irradiation through SiO2/Si interfaces: Non-conventional fabrication of Si nanocrystals for memory applications
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference9 articles.
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3. Defect and density evolution under high-fluence ion irradiation of Si/SiO2 heterostructures;Physical Review Materials;2020-01-03
4. Atomistic simulation of ion irradiation of semiconductor heterostructures;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2017-10
5. Formation and coarsening of sponge-like Si-SiO2 nanocomposites;Applied Physics Letters;2013-09-23
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